scia Systems GmbH

The Chemnitz-based company scia Systems develops equipment for ultra-precise surface processing based on complex plasma and ion beam technologies. The equipment is used for various coating, etching and cleaning processes, especially in the MEMS, microelectronics and precision optics industries. Due to their flexible and modular design, the systems are suitable for both research applications and large-scale production.

scia Systems stands for reliable equipment and high standards. To ensure this, the company offers comprehensive services from a single source. Not only the areas of design and manufacturing are realized internally, but also customer-specific process adaptation and subsequent service are part of the range of services. In addition, a worldwide network of local sales and service partners ensures optimal and individual customer support.

Technology portfolio

  • Ion Beam Trimming (IBT)
  • Ion beam etching (IBE)
  • Ion beam deposition (DIBD)
  • Plasma enhanced chemical vapor deposition (PECVD)
  • Reactive Ion Etching (RIE)
  • Magnetron sputtering
  • Plasma cleaning