FHR Anlagenbau GmbH

FHR Anlagenbau GmbH specializes in the development of innovative thin film technologies and equipment as well as services in the thin film sector. FHR cooperates with renowned industrial partners and research institutions worldwide.


Founded in 1991 in Dresden, the company is located in Ottendorf-Okrilla (150 employees). The company’s goal is to implement modern coating technologies in customized plant concepts.

Worth knowing

The largest business segment is coating equipment construction for the use of vapor deposition, sputtering, CVD and ALD technologies in industry and research. These systems are used in diverse areas of the economy such as photovoltaics, especially CIGS and organic PV, solar thermal, optics, electronics & sensor technology and in the automotive industry.

The product portfolio includes modular cluster systems for stationary coating of substrates, continuous systems (inline systems) with vertical or horizontal substrate layer for coating glass surfaces, and roll-to-roll systems for coating flexible substrates such as metal or polymer films. Especially in roll-to-roll vacuum coating, FHR holds a leading market position. Beyond plant engineering, FHR manufactures planar & pipe sputtering targets in a business unit and has a strong service department.