PD2 - Plasma diagnostics for plasma diffusion 4.0

Motivation:

•Intensity measurements and / or
•Compositions and/or
•Acquisition of generator characteristics and resulting gas atmospheres 

Target:

•Process data evaluation for follow-up projects Plasma 4.0, securing
•Process stability, reduction of process times (resource efficiency)

Tasks:

•plasma process data monitoring, additional measurement of ion density, comparison of mass spectrometer measurements | Langmuir probe | OES

Project duration:                                ca. 12 months

Contribution per partner:                   9.000 € plus VAT.

Scientific partners: Fraunhofer IST,

expertise in the field will also be contributed by: INP Greifswald

Contact:                                   

Carola Brand | INPLAS e.V. | T: +49 531 21 55 574 |carola.brand@inplas.de