PD2 - Plasma diagnostics for plasma diffusion 4.0


Intensity measurements and / or
Compositions and/or
Acquisition of generator characteristics and resulting gas atmospheres 



Process data evaluation for follow-up projects Plasma 4.0, securing
Process stability, reduction of process times (resource efficiency)


plasma process data monitoring, additional measurement of ion density, comparison of mass spectrometer measurements | Langmuir probe | OES



Project start:                                      01.02.2020

Project duration:                                ca. 12 months

Contribution per partner:                   10.000 € plus VAT.

INPLAS member:                                  9.000 € plus VAT. 



Scientific partner: Fraunhofer IST




Carola Brand | INPLAS e.V. | T: +49 531 21 55 574 |carola.brand@inplas.de