PDP² - Plasma diagnostics for Plasma Processes 4.0

Target:

• process data evaluation for follow-up projects Plasma 4.0
• ensuring process stability
• reduction of process times (resource efficiency)

Motivation:

• intensity measurements and/or
• compositions and/or
• acquisition of generator characteristics and resulting gas atmospheres

Tasks:

• plasma process data monitoring,
• measurement of ion density,
• comparison of mass spectrometer measurements | Langmuir probe | OES

Project duration:                                ca. 12 months

Contribution per partner:                   9,000 € plus VAT.

Scientific partners: Fraunhofer IST,

expertise in the field will also be contributed by: INP Greifswald

Contact:                                   

Carola Brand | INPLAS e.V. | T: +49 531 21 55 574 |carola.brand@inplas.de