PD2 - Plasma diagnostics for plasma diffusion 4.0


Intensity measurements and / or
Compositions and/or
Acquisition of generator characteristics and resulting gas atmospheres 



Process data evaluation for follow-up projects Plasma 4.0, securing
Process stability, reduction of process times (resource efficiency)


plasma process data monitoring, additional measurement of ion density, comparison of mass spectrometer measurements | Langmuir probe | OES



Project duration:                                ca. 12 months

Contribution per partner:                   9.000 € plus VAT.



Scientific partners: Fraunhofer IST,

expertise in the field will also be contributed by: INP Greifswald



Carola Brand | INPLAS e.V. | T: +49 531 21 55 574 |carola.brand@inplas.de