scia Systems is a full range supplier of advanced ion beam and plasma processing equipment. The systems are applicable for coating and etching processes in the production of microelectronics, MEMS and precision optical components, in both, high volume production as well as research and development environments.
Due to their flexible and modular design, the systems can be configured according to customer specific requirements. Amongst others by combining several vacuum process chambers into cluster or in-line solutions. Together with our worldwide service partners, we offer comprehensive service and superior technology support.
IIndustry Working Group Tool Coatings and Cutting Materials IAK, 45th edition
04 November 2021,online
INPLAS Working Group »Novel Plasma Sources and Processes«
30 November 2021, Braunschweig, Germany
INPLAS Working Group »Tool Coatings«
01 December 2021, online
INPLAS Working Group »Plasma4life«
expected spring 2022